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LEED v4 EBOM Campus/Group 3 buildings sharing 1 meter and energy source for Semiconductor Manufacturing

We are working with a semiconductor manufacturing facility that would like to achieve LEED EBOM for their manufacturing facility which is on a larger campus. The manufacturing building is supported by one main chiller plant building and a ultra purification water building. They are all served by that one chiller plant and meter. Can that one meter serve for campus or group approach, specifically energy benchmarking. 

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