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LEED Guidance for Campuses and Multiple Buildings

LEED v4 EBOM Campus/Group Benchmarking for 3 buildings sharing 1 meter and energy source for Semiconductor Manufacturing

We are working with a semiconductor manufacturing facility that would like to achieve LEED EBOM for their manufacturing facility which is on a larger campus. The manufacturing building is supported by one main chiller plant building and a ultra purification water building. They are all served by that one chiller plant and meter. For benchmarking are there any reccomendations for a high energy use that doesn't qualify for ENERGY STAR, ARC, ASHRAE or any other benchmarking platforms? The prefered approach was LEED EBOM v4.1 but does that inhibit that path?

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